SEM-EDX
Energy-dispersive X-ray spectroscopy in a scanning electron microscope, or SEM-EDX for short, can be used to determine the elemental composition of materials. The combination of SEM and EDX makes this analytical method a versatile tool for damage analysis, quality assurance and material testing.
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Brief explanation of SEM and EDX
Scanning electron microscopy:
SEM analysis
A scanning electron microscope (SEM) is a powerful instrument for surface analysis on materials. It generates high-resolution images by guiding an electron beam over the surface of the sample. During this process, the finest structures down to the nanometre range can be made visible. This method is mainly used in materials science, microtechnology and electronics to analyse microscopic details and topographical characteristics of surfaces.
Energy-dispersive X-ray spectroscopy:
EDX analysis
Energy-dispersive X-ray spectroscopy (EDX) is an analytical technique that analyses the elemental composition of materials. EDX utilises X-rays to identify and quantify the chemical elements in a sample. This method is often used to verify if there is contamination on the surface of samples, to identify foreign-matter inclusions in materials and to detect the finest traces of corrosion that are not visible to the naked eye. EDX analysis is usually undertaken in combination with SEM analysis.
What is SEM-EDX?
SEM-EDX is an analytical method that combines microscopy and spectroscopy. Scanning electron microscopy (SEM) is used to create high-resolution images of the surface structure of a sample. The subsequent EDX analysis permits the identification and quantification of the chemical elements present in the sample. By means of this combination, the method provides both optical and chemical information and is particularly effective for analysing material defects, contamination and the exact composition of materials.
SEM-EDX analysis
at Quality Analysis
In our analysis laboratory, we use state-of-the-art scanning electron microscopes with EDX detectors from ZEISS to provide you precise, reliable results. In this way we can analyse even the smallest areas or particles for specific elements to identify potential problems at an early stage.
Applications: EDX analysis
- Analysis of alloy compositions of the smallest metallic particles or examination of coatings and flaws in coating systems
- Analysis of filler materials in plastics and examination of ceramics as part of quality control
- Verification and identification of contamination, deposits and inclusions during damage analysis
- Analysis of layer thicknesses, coatings and their chemical composition
- Identification of metallic and mineral particles down to the nanometre range, for example in industrial or pharmaceutical products
Procedure during EDX analysis
EDX analysis on a scanning electron microscope combines imaging and chemical analysis in a single process, which typically involves the following steps:
1
SEM imaging
In the scanning electron microscope, a fine electron beam is incident on the sample. The interaction of the electrons with the material generates signals such as secondary electrons, which provide high-resolution images of the surface structure. During this process, microscopic details down to the nanometre range can be made visible.
2
Detection of the X-rays
While the electron beam scans the sample, the electrons stimulate the atoms in the material to emit X-rays. This X-ray radiation is characteristic for every chemical element. An EDX detector acquires these signals and permits the identification and quantification of the elements in the area analysed.
3
Data evaluation
The signals measured are displayed in a spectrum in which the peaks correspond to the chemical elements identified. It is also possible to quantify the elements analysed.
For what is SEM-EDX analysis used?
SEM-EDX analysis is used in numerous applications where material characterisation is required. Typically, it is used in material testing, quality control, damage analysis and research & development. The combination of high-resolution imaging and chemical analysis is indispensable particularly in electronics manufacturing, the automotive industry, aerospace and medical technology.
Analysis of the chemical composition
SEM-EDX analysis can be used to determine the elemental compositions of materials. This information is crucial for quality control and the optimisation of production processes, because even the smallest deviations in material composition can influence the characteristics and functionality of components.

Damage analysis
If damage occurs, sample analysis provides valuable insights into material defects caused by corrosion, wear or mechanical loads, for example. By analysing the elements involved and their distribution in the material, the causes of damage can be determined in more detail and measures to prevent defects derived.

Correlative particle analysis
A speciality is correlative particle analysis. For this purpose, we combine light microscopy with SEM-EDX analysis, RAMAN spectroscopy and FTIR spectroscopy. Organic, inorganic and process-critical particles can then be detected and identified even more accurately.

Residual dirt analysis
In the electronics and automotive industries, it is essential to identify contamination on components that could impair the functionality or service life of the components. Using SEM-EDX analysis, even tiny particles can be detected and their chemical composition analysed to eliminate potential sources of defects at an early stage.
SEM-EDX in summary
SEM-EDX analysis is a powerful method for the analysis of the chemical composition and structure of materials. It combines the high-resolution imaging of the scanning electron microscope (SEM) with chemical analysis using energy-dispersive X-ray spectroscopy (EDX). This technique is particularly effective in identifying contamination, investigating the causes of damage and precisely analysing materials and particles in many industrial sectors.
